Wiring techniques for large size silicon probe using electroplating
نویسندگان
چکیده
منابع مشابه
Seedless electroplating on patterned silicon
Nickel thin films have been electrodeposited without the use of an additional seed layer, on highly doped silicon wafers. These substrates conduct sufficiently well to allow deposition using a peripherical electrical contact on the wafer. Films 2 μm thick have been deposited using a nickel sulfamate bath on both n+and p+-type silicon wafers, where a series of trenches with different widths had ...
متن کاملSub-10 Nanometer Feature Size in Silicon Using Thermal Scanning Probe Lithography
High-resolution lithography often involves thin resist layers which pose a challenge for pattern characterization. Direct evidence that the pattern was well-defined and can be used for device fabrication is provided if a successful pattern transfer is demonstrated. In the case of thermal scanning probe lithography (t-SPL), highest resolutions are achieved for shallow patterns. In this work, we ...
متن کاملAccelerated decomposition techniques for large discounted Markov decision processes
Many hierarchical techniques to solve large Markov decision processes (MDPs) are based on the partition of the state space into strongly connected components (SCCs) that can be classified into some levels. In each level, smaller problems named restricted MDPs are solved, and then these partial solutions are combined to obtain the global solution. In this paper, we first propose a novel algorith...
متن کاملEvaluation of Vapor Deposition Techniques for Membrane Pore Size Modification
The suitability of three vapor deposition techniques for pore size modification was evaluated using polycarbonate track etched membranes as model supports. A feature scale model was employed to predict the pore geometry after modification and the resulting pure water flux. Physical vapor deposition (PVD) and pulsed plasma-enhanced chemical vapor deposition (PECVD), naturally, form asymmetric na...
متن کاملusing game theory techniques in self-organizing maps training
شبکه خود سازمانده پرکاربردترین شبکه عصبی برای انجام خوشه بندی و کوانتیزه نمودن برداری است. از زمان معرفی این شبکه تاکنون، از این روش در مسائل مختلف در حوزه های گوناگون استفاده و توسعه ها و بهبودهای متعددی برای آن ارائه شده است. شبکه خودسازمانده از تعدادی سلول برای تخمین تابع توزیع الگوهای ورودی در فضای چندبعدی استفاده می کند. احتمال وجود سلول مرده مشکلی اساسی در الگوریتم شبکه خودسازمانده به حسا...
ذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Electronics and Communications in Japan
سال: 2020
ISSN: 1942-9533,1942-9541
DOI: 10.1002/ecj.12266